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Link to original content: https://unpaywall.org/10.1007/S11432-020-3057-Y
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Mode-localized accelerometer with ultrahigh sensitivity

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Abstract

The mode localization phenomenon is an effective technique to enhance sensor sensitivity, and some low noise floor mode-localized sensors, including accelerometers, mass sensors, and electrometers, have been successfully realized. To further improve the performance of the mode-localized accelerometer, we report a microelectromechanical system mode-localized accelerometer based on 4-degree of freedom (DoF) weakly coupled resonators (WCRs) with a stress-relief structure eliminating the thermal stress generated during the silicon-on-glass fabrication process. Experimental results show that compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.40 g−1), the amplitude ratio-based sensitivity of the proposed accelerometer (119.36 V·g−1) is improved by 2612%. Moreover, the noise floor is 0.64 µg·Hz−1/2 from 0.01 to 3 Hz under the closed-loop circumstance. To the authors’ best knowledge, this is the lowest measured noise floor for mode-localized accelerometers.

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References

  1. Middlemiss R P, Samarelli A, Paul D J, et al. Measurement of the earth tides with a MEMS gravimeter. Nature, 2016, 531: 614–617

    Article  Google Scholar 

  2. Zou X D, Thiruvenkatanathan P, Seshia A A. A seismic-grade resonant MEMS accelerometer. J Microelectromech Syst, 2014, 23: 768–770

    Article  Google Scholar 

  3. Boom B A, Bertolini A, Hennes E, et al. Nano-G accelerometer using geometric anti-springs. In: Proceedings of the 30th International Conference on Micro Electro Mechanical Systems, Las Vegas, 2017. 33–36

  4. Krishnamoorthy U, Olsson III R H, Bogart G R, et al. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. Sens Actuat A-Phys, 2008, 145–146: 283–290

    Article  Google Scholar 

  5. Liu C-H, Kenny T W. A high-precision, wide-bandwidth micromachined tunneling accelerometer. J Microelectromech Syst, 2001, 10: 425–433

    Article  Google Scholar 

  6. Spletzer M, Raman A, Wu A Q, et al. Ultrasensitive mass sensing using mode localization in coupled microcantilevers. Appl Phys Lett, 2006, 88: 254102

    Article  Google Scholar 

  7. Thiruvenkatanathan P, Yan J, Woodhouse J, et al. Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Appl Phys Lett, 2010, 96: 081913

    Article  Google Scholar 

  8. Zhao C, Wood G S, Xie J, et al. A force sensor based on three weakly coupled resonators with ultrahigh sensitivity. Sens Actuat A-Phys, 2015, 232: 151–162

    Article  Google Scholar 

  9. Manav M, Reynen G, Sharma M, et al. Ultrasensitive resonant MEMS transducers with tuneable coupling. J Micromech Microeng, 2014, 24: 055005

    Article  Google Scholar 

  10. Zhang H, Li B, Yuan W, et al. An acceleration sensing method based on the mode localization of weakly coupled resonators. J Microelectromech Syst, 2016, 25: 286–296

    Article  Google Scholar 

  11. Yang J, Zhong J, Chang H. A closed-loop mode-localized accelerometer. J Microelectromech Syst, 2018, 27: 210–217

    Article  Google Scholar 

  12. Kang H, Yang J, Chang H. A closed-loop accelerometer based on three degree-of-freedom weakly coupled resonator with self-elimination of feedthrough signal. IEEE Sens J, 2018, 18: 3960–3967

    Article  Google Scholar 

  13. Pandit M, Zhao C, Sobreviela G, et al. A mode-localized MEMS accelerometer with 7 µg bias stability. In: Proceedings of the 31st International Conference on Micro Electro Mechanical Systems, Belfast, 2018. 968–971

  14. Pandit M, Zhao C, Sobreviela G, et al. A high resolution differential mode-localized MEMS accelerometer. J Microelectromech Syst, 2019, 28: 782–789

    Article  Google Scholar 

  15. Zhang H, Huang J, Yuan W, et al. A high-sensitivity micromechanical electrometer based on mode localization of two degree-of-freedom weakly coupled resonators. J Microelectromech Syst, 2016, 25: 937–946

    Article  Google Scholar 

  16. Thiruvenkatanathan P, Yan J, Seshia A A. Ultrasensitive mode-localized micromechanical electrometer. In: Proceedings of 2010 IEEE International Frequency Control Symposium, Newport Beach, 2010. 91–96

  17. Zhang H, Chang H, Yuan W. Characterization of forced localization of disordered weakly coupled micromechanical resonators. Microsyst Nanoeng, 2017, 3: 17023

    Article  Google Scholar 

  18. Zhong J, Yang J, Chang H. The temperature drift suppression of mode-localized resonant sensors. In: Proceedings of the 31st International Conference on Micro Electro Mechanical Systems, Belfast, 2018. 467–470

  19. Thiruvenkatanathan P, Yan J, Seshia A A. Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications. In: Proceedings of 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum, Besancon, 2009. 358–363

  20. Pandit M, Zhao C, Sobreviela G, et al. Practical limits to common mode rejection in mode localized weakly coupled resonators. IEEE Sens J, 2020, 20: 6818–6825

    Article  Google Scholar 

  21. Zhang H, Zhong J, Yuan W, et al. Ambient pressure drift rejection of mode-localized resonant sensors. In: Proceedings of the 30th International Conference on Micro Electro Mechanical Systems, Las Vegas, 2017. 1095–1098

  22. Kang H, Yang J, Chang H. A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators. In: Proceedings of the 31st International Conference on Micro Electro Mechanical Systems, Belfast, 2018. 960–963

  23. Thomson W. Theory of Vibration With Application. Boca Raton: CRC Press, 2018

    Book  Google Scholar 

  24. Hao Y, Yuan W, Xie J, et al. Design and verification of a structure for isolating packaging stress in SOI MEMS devices. IEEE Sens J, 2017, 17: 1246–1254

    Article  Google Scholar 

  25. Zhang H, Kang H, Chang H. Suppression on nonlinearity of mode-localized sensors using algebraic summation of amplitude ratios as the output metric. IEEE Sens J, 2018, 18: 7802–7809

    Article  Google Scholar 

  26. Zhang H, Yang J, Yuan W, et al. Linear sensing for mode-localized sensors. Sens Actuat A-Phys, 2018, 277: 35–42

    Article  Google Scholar 

  27. Gabrielson T B. Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Trans Electron Devices, 1993, 40: 903–909

    Article  Google Scholar 

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Acknowledgements

This work was supported by the National Key Research and Development Program of China (Grant No. 2018YFB2002600), Shaanxi Key Research and Development Program (Grant No. 2019ZDLGY02-06), Fundamental Research Funds for the Central Universities (Grant No. 3102019JC002), and National Natural Science Foundation of China (Grant No. 51805441).

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Authors and Affiliations

  1. Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi’an, 710072, China

    Hao Kang, Bing Ruan, Yongcun Hao & Honglong Chang

Authors
  1. Hao Kang
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  2. Bing Ruan
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  3. Yongcun Hao
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  4. Honglong Chang
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Correspondence to Honglong Chang.

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Kang, H., Ruan, B., Hao, Y. et al. Mode-localized accelerometer with ultrahigh sensitivity. Sci. China Inf. Sci. 65, 142402 (2022). https://doi.org/10.1007/s11432-020-3057-y

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  • DOI: https://doi.org/10.1007/s11432-020-3057-y

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