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Link to original content: https://dblp.uni-trier.de/rec/journals/eswa/KangLCKPPD09.nt
. . . . . "Pilsung Kang et al.: A virtual metrology system for semiconductor manufacturing. (2009)" . . _:ID_9080cf362e7091ada7cc28518e4adb2e . _:ID_9080cf362e7091ada7cc28518e4adb2e . _:ID_9080cf362e7091ada7cc28518e4adb2e . _:ID_9080cf362e7091ada7cc28518e4adb2e . _:ID_9080cf362e7091ada7cc28518e4adb2e "journals/eswa/KangLCKPPD09" . _:ID_9384ff40bdcc83aa4e082a2deca3e422 . _:ID_9384ff40bdcc83aa4e082a2deca3e422 . _:ID_9384ff40bdcc83aa4e082a2deca3e422 . _:ID_9384ff40bdcc83aa4e082a2deca3e422 . _:ID_9384ff40bdcc83aa4e082a2deca3e422 "10.1016/J.ESWA.2009.05.053" . "A virtual metrology system for semiconductor manufacturing." . . . . . . . . . . . . . . . . "7"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 "Pilsung Kang 0001" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 "1"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_1 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 "Hyoungjoo Lee" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 "2"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_2 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 "Sungzoon Cho" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 "3"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_3 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 "Dongil Kim" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 "4"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_4 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 "Jinwoo Park" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 "5"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_5 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 "Chan-Kyoo Park" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 "6"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_6 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 "Seungyong Doh" . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 "7"^^ . _:Sig_2cbfe2603eb68ef1440b3b7b9e90d872_7 . . . . . "12554-12561" . "Expert Syst. Appl." . "Expert Syst. Appl." . "36" . "10" . "2009"^^ . "provenance information for RDF data of dblp record 'journals/eswa/KangLCKPPD09'" . . . . "2023-03-21T21:04:32+0100" .