Weiwei XiangLi WenHai Wang 0018Qiuping ZhangJiaru ChuElectrical and optical testing system for microplasma in scanning plasma etching.572-5762009NEMShttps://doi.org/10.1109/NEMS.2009.5068645https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068645conf/nems/2009db/conf/nems/nems2009.html#XiangWWZC09