Ji Chen et al.: High-performance motion control of an XY stage for complicated contours with BFC trajectory planning. (2016)conf/icinfa/ChenHZW1610.1109/ICINFA.2016.7832051High-performance motion control of an XY stage for complicated contours with BFC trajectory planning.4Ji Chen1Chuxiong Hu2Yu Zhu 00013Ze Wang 000241473-1478ICIAICIA20162016provenance information for RDF data of dblp record 'conf/icinfa/ChenHZW16'2024-02-21T17:04:18+0100