Kan Wu et al.: Compatibility of Queueing Theory, Manufacturing Systems and SEMI Standards. (2007)conf/case/WuMZ0710.1109/COASE.2007.4341792Compatibility of Queueing Theory, Manufacturing Systems and SEMI Standards.3Kan Wu 00011Leon F. McGinnis2Bert Zwart3501-506CASECASE20072007provenance information for RDF data of dblp record 'conf/case/WuMZ07'2022-12-28T16:23:40+0100