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Link to original content: https://dblp.org/rec/journals/tim/JenFL22.ttl
@prefix xsd: . @prefix rdf: . @prefix rdfs: . @prefix owl: . @prefix bf: . @prefix bibo: . @prefix bibtex: . @prefix cito: . @prefix datacite: . @prefix dbo: . @prefix dc: . @prefix dct: . @prefix foaf: . @prefix litre: . @prefix locid: . @prefix locrel: . @prefix schema: . @prefix wd: . @prefix wdt: . @prefix dblp: . owl:sameAs , ; rdfs:label "Chih-Hung Jen et al.: Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing. (2022)" ; dblp:doi ; datacite:hasIdentifier [ datacite:usesIdentifierScheme datacite:dblp-record ; litre:hasLiteralValue "journals/tim/JenFL22" ; a datacite:ResourceIdentifier, datacite:Identifier ], [ datacite:usesIdentifierScheme datacite:doi ; litre:hasLiteralValue "10.1109/TIM.2022.3207807" ; a datacite:ResourceIdentifier, datacite:Identifier ] ; dblp:title "Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing." ; dblp:bibtexType bibtex:Article ; dblp:authoredBy , , ; dblp:createdBy , , ; dblp:numberOfCreators 3 ; dblp:hasSignature [ dblp:signatureDblpName "Chih-Hung Jen" ; dblp:signatureCreator ; dblp:signatureOrcid ; dblp:signatureOrdinal 1 ; dblp:signaturePublication ; a dblp:AuthorSignature, dblp:Signature ], [ dblp:signatureDblpName "Shu-Kai S. Fan" ; dblp:signatureCreator ; dblp:signatureOrcid ; dblp:signatureOrdinal 2 ; dblp:signaturePublication ; a dblp:AuthorSignature, dblp:Signature ], [ dblp:signatureDblpName "Yu-Yu Lin" ; dblp:signatureCreator ; dblp:signatureOrcid ; dblp:signatureOrdinal 3 ; dblp:signaturePublication ; a dblp:AuthorSignature, dblp:Signature ] ; dblp:primaryDocumentPage ; dblp:documentPage ; dblp:listedOnTocPage ; dblp:publishedInStream ; dblp:pagination "1-12" ; dblp:publishedIn "IEEE Trans. Instrum. Meas." ; dblp:publishedInJournal "IEEE Trans. Instrum. Meas." ; dblp:publishedInJournalVolume "71" ; dblp:yearOfPublication "2022"^^ ; a dblp:Publication, dblp:Article . rdfs:label "provenance information for RDF data of dblp record 'journals/tim/JenFL22'" ; dct:creator ; dct:isPartOf ; dct:modified "2022-10-18T22:17:25+0200" ; dct:license .