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Link to original content: https://dblp.org/rec/journals/tim/JenFL22.rdf
Chih-Hung Jen et al.: Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing. (2022) journals/tim/JenFL22 10.1109/TIM.2022.3207807 Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing. 3 Chih-Hung Jen 1 Shu-Kai S. Fan 2 Yu-Yu Lin 3 1-12 IEEE Trans. Instrum. Meas. IEEE Trans. Instrum. Meas. 71 2022 provenance information for RDF data of dblp record 'journals/tim/JenFL22' 2022-10-18T22:17:25+0200