Martin Probst et al.: Manufacturing of a Hybrid Acoustic Transmitter Using an Advanced Microassembly System. (2009)journals/tie/ProbstFPENN0910.1109/TIE.2009.2021173Manufacturing of a Hybrid Acoustic Transmitter Using an Advanced Microassembly System.6Martin Probst1Michael Flückiger2Salvador Pané3Olgaç Ergeneman4Zoltán Nagy 00025Bradley J. Nelson62657-2666IEEE Trans. Ind. Electron.IEEE Trans. Ind. Electron.5672009provenance information for RDF data of dblp record 'journals/tie/ProbstFPENN09'2020-05-22T15:35:04+0200