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Link to original content: https://dblp.org/rec/journals/tie/LiZYHM17.rdf
Min Li et al.: An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage. (2017) journals/tie/LiZYHM17 10.1109/TIE.2016.2562606 Q59894936 An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage. 5 Min Li 0016 1 Yu Zhu 0001 2 Kaiming Yang 3 Chuxiong Hu 4 Haihua Mu 5 4139-4149 IEEE Trans. Ind. Electron. IEEE Trans. Ind. Electron. 64 5 2017 provenance information for RDF data of dblp record 'journals/tie/LiZYHM17' 2020-11-04T08:42:50+0100