Provider: Schloss Dagstuhl - Leibniz Center for Informatics
Database: dblp computer science bibliography
Content:text/plain; charset="utf-8"
TY - JOUR
ID - DBLP:journals/mj/MukhiyaBBLZ11
AU - Mukhiya, Ravindra
AU - Bagolini, Alvise
AU - Bhattacharyya, T. K.
AU - Lorenzelli, Leandro
AU - Zen, M.
TI - Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.
JO - Microelectron. J.
VL - 42
IS - 1
SP - 127
EP - 134
PY - 2011//
DO - 10.1016/J.MEJO.2010.08.018
UR - https://doi.org/10.1016/j.mejo.2010.08.018
ER -
