Daisuke Yamane et al.: An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism. (2010)journals/ieiceee/YamaneSSKFT1010.1587/ELEX.7.80An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism.6Daisuke Yamane1Winston Sun2Harunobu Seita3Shigeo Kawasaki4Hiroyuki Fujita5Hiroshi Toshiyoshi680-85IEICE Electron. ExpressIEICE Electron. Express722010provenance information for RDF data of dblp record 'journals/ieiceee/YamaneSSKFT10'2021-02-12T22:20:30+0100