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Link to original content: https://dblp.org/rec/journals/corr/abs-0711-3317.xml
Raquel Hellin-Rico Jean Pierre Celis Kris Baert Chris Van Hoof Ann Witvrouw A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C http://arxiv.org/abs/0711.3317 2007 CoRR abs/0711.3317 db/journals/corr/corr0711.html#abs-0711-3317