Provider: Schloss Dagstuhl - Leibniz Center for Informatics
Database: dblp computer science bibliography
Content:text/plain; charset="utf-8"
TY - JOUR
ID - DBLP:journals/aei/FanHJCJ20
AU - Fan, Shu-Kai S.
AU - Hsu, Chia-Yu
AU - Jen, Chih-Hung
AU - Chen, Kuan-Lung
AU - Juan, Li-Ting
TI - Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes.
JO - Adv. Eng. Informatics
VL - 46
SP - 101166
PY - 2020//
DO - 10.1016/J.AEI.2020.101166
UR - https://doi.org/10.1016/j.aei.2020.101166
ER -
