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https://dblp.org/rec/conf/nems/XieYC09.nt
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"Jianbing Xie et al.: A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. (2009)" .
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_:ID_d874e3fa8e434d9fbead89b388ebd1de . _:ID_d874e3fa8e434d9fbead89b388ebd1de
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"conf/nems/XieYC09" .
_:ID_06d41c6f95c652623ec6f58295a828bb . _:ID_06d41c6f95c652623ec6f58295a828bb
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"10.1109/NEMS.2009.5068571" .
"A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers." .
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"3"^^
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_:Sig_906eb3f47780375b76a759ad7228bb9a_1 . _:Sig_906eb3f47780375b76a759ad7228bb9a_1
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"Jianbing Xie" . _:Sig_906eb3f47780375b76a759ad7228bb9a_1
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"1"^^
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_:Sig_906eb3f47780375b76a759ad7228bb9a_2 . _:Sig_906eb3f47780375b76a759ad7228bb9a_2
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"Weizheng Yuan" . _:Sig_906eb3f47780375b76a759ad7228bb9a_2
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"2"^^
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_:Sig_906eb3f47780375b76a759ad7228bb9a_3 . _:Sig_906eb3f47780375b76a759ad7228bb9a_3
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"Honglong Chang" . _:Sig_906eb3f47780375b76a759ad7228bb9a_3
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"3"^^
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"253-256" .
"NEMS" .
"NEMS" .
"2009"^^
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"2009"^^
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"provenance information for RDF data of dblp record 'conf/nems/XieYC09'" .
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"2023-03-23T23:58:03+0100" .
