Dongyang Kang et al.: In situ heating to improve adhesion for parylene-on-parylene deposition. (2012)conf/nems/KangCKT1210.1109/NEMS.2012.6196762In situ heating to improve adhesion for parylene-on-parylene deposition.4Dongyang Kang1Jay Han-Chieh Chang2Justin Young-Hyun Kim3Yu-Chong Tai4226-229NEMSNEMS20122012provenance information for RDF data of dblp record 'conf/nems/KangCKT12'2017-05-17T14:24:28+0200