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Link to original content: https://dblp.org/rec/conf/nems/ChungJCW10.xml
Chen-Kuei Chung J. J. Jhu S. C. Chang B. H. Wu Evolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering. 344-347 2010 NEMS https://doi.org/10.1109/NEMS.2010.5592231 conf/nems/2010 db/conf/nems/nems2010.html#ChungJCW10