Chen-Kuei ChungJ. J. JhuS. C. ChangB. H. WuEvolution of mechanical property of nanocomposite TiSiN films using reactive magnetron cosputtering.344-3472010NEMShttps://doi.org/10.1109/NEMS.2010.5592231conf/nems/2010db/conf/nems/nems2010.html#ChungJCW10