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Link to original content: https://dblp.org/rec/conf/amcc/ZhuLP05.xml
Guchuan Zhu Jean Lévine Laurent Praly On the differential flatness and control of electrostatically actuated MEMS. 2493-2498 2005 ACC https://doi.org/10.1109/ACC.2005.1470341 conf/amcc/2005 db/conf/amcc/acc2005.html#ZhuLP05