Andrew J. Fleming et al.: Ultra-fast dual-stage vertical positioning for high performance SPMs. (2010)conf/amcc/FlemingKL1010.1109/ACC.2010.5530950Ultra-fast dual-stage vertical positioning for high performance SPMs.3Andrew J. Fleming1Brian J. Kenton2Kam K. Leang34975-4980ACCACC20102010provenance information for RDF data of dblp record 'conf/amcc/FlemingKL10'2022-06-23T15:35:55+0200