Provider: Schloss Dagstuhl - Leibniz Center for Informatics
Database: dblp computer science bibliography
Content:text/plain; charset="utf-8"
TY - CPAPER
ID - DBLP:conf/3dic/SeoPK19
AU - Seo, Han Kyeol
AU - Park, Hae-Sung
AU - Kim, Sarah Eunkyung
TI - Effects of Argon and Nitrogen ion Bombardments on Sputtered and Electroplated Cu Surfaces for Cu Bonding Application.
BT - 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019
SP - 1
EP - 4
PY - 2019//
DO - 10.1109/3DIC48104.2019.9058789
UR - https://doi.org/10.1109/3DIC48104.2019.9058789
ER -