Cheng-Ta Ko et al.: Wafer-level 3D integration with Cu TSV and micro-bump/adhesive hybrid bonding technologies. (2011)conf/3dic/KoHCCHFHCTCLC1110.1109/3DIC.2012.6262949Wafer-level 3D integration with Cu TSV and micro-bump/adhesive hybrid bonding technologies.12Cheng-Ta Ko1Zhi-Cheng Hsiao2Y. J. Chang3Peng-Shu Chen4J. H. Huang5Hsin-Chia Fu6Y. J. Huang7C. W. Chiang8W. L. Tsat9Y. H. Chen10Wei-Chung Lo11Kuan-Neng Chen121-43DIC3DIC20112012provenance information for RDF data of dblp record 'conf/3dic/KoHCCHFHCTCLC11'2017-09-16T12:09:38+0200