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Link to original content: https://dblp.org/rec/conf/3dic/KoCLCHHFC10.nt
. . . . "Cheng-Ta Ko et al.: Wafer-level 3D integration using hybrid bonding. (2010)" . . _:ID_24b11be1b5785158366c50c0a0483697 . _:ID_24b11be1b5785158366c50c0a0483697 . _:ID_24b11be1b5785158366c50c0a0483697 . _:ID_24b11be1b5785158366c50c0a0483697 . _:ID_24b11be1b5785158366c50c0a0483697 "conf/3dic/KoCLCHHFC10" . _:ID_3c4c3426c883b31bf028d672f19edc8b . _:ID_3c4c3426c883b31bf028d672f19edc8b . _:ID_3c4c3426c883b31bf028d672f19edc8b . _:ID_3c4c3426c883b31bf028d672f19edc8b . _:ID_3c4c3426c883b31bf028d672f19edc8b "10.1109/3DIC.2010.5751463" . "Wafer-level 3D integration using hybrid bonding." . . . . . . . . . . . . . . . . . . "8"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 "Cheng-Ta Ko" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 "1"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_1 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 "Kuan-Neng Chen" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 "2"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_2 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 "Wei-Chung Lo" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 "3"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_3 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 "Chuan-An Cheng" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 "4"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_4 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 "Wen-Chun Huang" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 "5"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_5 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 "Zhi-Cheng Hsiao" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 "6"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_6 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 "Huan-Chun Fu" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 "7"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_7 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 "Yu-Hua Chen" . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 "8"^^ . _:Sig_0b3f1728e6c1ff141cfa4c07d191e453_8 . . . . . "1-4" . "3DIC" . "3DIC" . "2010"^^ . "2010"^^ . . "provenance information for RDF data of dblp record 'conf/3dic/KoCLCHHFC10'" . . . . "2017-09-16T12:09:38+0200" .