Fumiki KatoKatsuya KikuchiHiroshi NakagawaMasahiro AoyagiHot spots suppression by high thermal conductivity film in thin-sub strate CMOS ICs for 3D integration.1-420113DIChttps://doi.org/10.1109/3DIC.2012.6263005conf/3dic/2011db/conf/3dic/3dic2011.html#KatoKNA11