{"id":"https://openalex.org/W2186511346","doi":"https://doi.org/10.1109/tii.2015.2481719","title":"Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps","display_name":"Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps","publication_year":2015,"publication_date":"2015-09-24","ids":{"openalex":"https://openalex.org/W2186511346","doi":"https://doi.org/10.1109/tii.2015.2481719","mag":"2186511346"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2015.2481719","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"journal-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027416187","display_name":"Fatima Adly","orcid":null},"institutions":[{"id":"https://openalex.org/I176601375","display_name":"Khalifa University of Science and Technology","ror":"https://ror.org/05hffr360","country_code":"AE","type":"education","lineage":["https://openalex.org/I176601375"]},{"id":"https://openalex.org/I52357470","display_name":"The Ohio State University","ror":"https://ror.org/00rs6vg23","country_code":"US","type":"education","lineage":["https://openalex.org/I52357470"]}],"countries":["AE","US"],"is_corresponding":false,"raw_author_name":"Fatima Adly","raw_affiliation_strings":["Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","ECE Department, Ohio State University, Columbus, OH, USA"],"affiliations":[{"raw_affiliation_string":"Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","institution_ids":["https://openalex.org/I176601375"]},{"raw_affiliation_string":"ECE Department, Ohio State University, Columbus, OH, USA","institution_ids":["https://openalex.org/I52357470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088743570","display_name":"Omar Alhussein","orcid":"https://orcid.org/0000-0002-1531-5916"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Omar Alhussein","raw_affiliation_strings":["School of Engineering Science, Simon Fraser University, Burnaby, BC, Canada"],"affiliations":[{"raw_affiliation_string":"School of Engineering Science, Simon Fraser University, Burnaby, BC, Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014443986","display_name":"Paul D. Yoo","orcid":"https://orcid.org/0000-0001-7665-8616"},"institutions":[{"id":"https://openalex.org/I9300472","display_name":"Bournemouth University","ror":"https://ror.org/05wwcw481","country_code":"GB","type":"education","lineage":["https://openalex.org/I9300472"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Paul D. Yoo","raw_affiliation_strings":["Department of Computing and Informatics, Bournemouth University, Poole, U.K."],"affiliations":[{"raw_affiliation_string":"Department of Computing and Informatics, Bournemouth University, Poole, U.K.","institution_ids":["https://openalex.org/I9300472"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077119932","display_name":"Yousof Al-Hammadi","orcid":"https://orcid.org/0000-0001-6469-9154"},"institutions":[{"id":"https://openalex.org/I176601375","display_name":"Khalifa University of Science and Technology","ror":"https://ror.org/05hffr360","country_code":"AE","type":"education","lineage":["https://openalex.org/I176601375"]},{"id":"https://openalex.org/I52357470","display_name":"The Ohio State University","ror":"https://ror.org/00rs6vg23","country_code":"US","type":"education","lineage":["https://openalex.org/I52357470"]}],"countries":["AE","US"],"is_corresponding":false,"raw_author_name":"Yousof Al-Hammadi","raw_affiliation_strings":["Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","ECE Department, Ohio State University, Columbus, OH, USA"],"affiliations":[{"raw_affiliation_string":"Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","institution_ids":["https://openalex.org/I176601375"]},{"raw_affiliation_string":"ECE Department, Ohio State University, Columbus, OH, USA","institution_ids":["https://openalex.org/I52357470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074032096","display_name":"Kamal Taha","orcid":"https://orcid.org/0000-0002-6674-4614"},"institutions":[{"id":"https://openalex.org/I176601375","display_name":"Khalifa University of Science and Technology","ror":"https://ror.org/05hffr360","country_code":"AE","type":"education","lineage":["https://openalex.org/I176601375"]},{"id":"https://openalex.org/I52357470","display_name":"The Ohio State University","ror":"https://ror.org/00rs6vg23","country_code":"US","type":"education","lineage":["https://openalex.org/I52357470"]}],"countries":["AE","US"],"is_corresponding":false,"raw_author_name":"Kamal Taha","raw_affiliation_strings":["Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","ECE Department, Ohio State University, Columbus, OH, USA"],"affiliations":[{"raw_affiliation_string":"Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","institution_ids":["https://openalex.org/I176601375"]},{"raw_affiliation_string":"ECE Department, Ohio State University, Columbus, OH, USA","institution_ids":["https://openalex.org/I52357470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004034156","display_name":"Sami Muhaidat","orcid":"https://orcid.org/0000-0003-4649-9399"},"institutions":[{"id":"https://openalex.org/I176601375","display_name":"Khalifa University of Science and Technology","ror":"https://ror.org/05hffr360","country_code":"AE","type":"education","lineage":["https://openalex.org/I176601375"]},{"id":"https://openalex.org/I52357470","display_name":"The Ohio State University","ror":"https://ror.org/00rs6vg23","country_code":"US","type":"education","lineage":["https://openalex.org/I52357470"]}],"countries":["AE","US"],"is_corresponding":false,"raw_author_name":"Sami Muhaidat","raw_affiliation_strings":["Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","ECE Department, Ohio State University, Columbus, OH, USA"],"affiliations":[{"raw_affiliation_string":"Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","institution_ids":["https://openalex.org/I176601375"]},{"raw_affiliation_string":"ECE Department, Ohio State University, Columbus, OH, USA","institution_ids":["https://openalex.org/I52357470"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031557389","display_name":"Young\u2010Seon Jeong","orcid":"https://orcid.org/0000-0002-8934-0989"},"institutions":[{"id":"https://openalex.org/I111277659","display_name":"Chonnam National University","ror":"https://ror.org/05kzjxq56","country_code":"KR","type":"education","lineage":["https://openalex.org/I111277659"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Young-Seon Jeong","raw_affiliation_strings":["Chonnam National University, Gwangju, South Korea"],"affiliations":[{"raw_affiliation_string":"Chonnam National University, Gwangju, South Korea","institution_ids":["https://openalex.org/I111277659"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065792651","display_name":"Ui-Hyoung Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Uihyoung Lee","raw_affiliation_strings":["Memory Division, Samsung Electronics Co., Hwasung, South Korea"],"affiliations":[{"raw_affiliation_string":"Memory Division, Samsung Electronics Co., Hwasung, South Korea","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020983859","display_name":"Mohammed Ismail","orcid":"https://orcid.org/0000-0001-9574-0949"},"institutions":[{"id":"https://openalex.org/I176601375","display_name":"Khalifa University of Science and Technology","ror":"https://ror.org/05hffr360","country_code":"AE","type":"education","lineage":["https://openalex.org/I176601375"]},{"id":"https://openalex.org/I52357470","display_name":"The Ohio State University","ror":"https://ror.org/00rs6vg23","country_code":"US","type":"education","lineage":["https://openalex.org/I52357470"]}],"countries":["AE","US"],"is_corresponding":false,"raw_author_name":"Mohammed Ismail","raw_affiliation_strings":["Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","ECE Department, Ohio State University, Columbus, OH, USA"],"affiliations":[{"raw_affiliation_string":"Advanced Technology Investment Company (ATIC)-Khalifa Semiconductor Research Center, Khalifa University, Abu Dhabi, United Arab Emirates","institution_ids":["https://openalex.org/I176601375"]},{"raw_affiliation_string":"ECE Department, Ohio State University, Columbus, OH, USA","institution_ids":["https://openalex.org/I52357470"]}]}],"institution_assertions":[],"countries_distinct_count":5,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":6.591,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":79,"citation_normalized_percentile":{"value":0.999906,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":98},"biblio":{"volume":"11","issue":"6","first_page":"1267","last_page":"1276"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9914,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9867,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6580302},{"id":"https://openalex.org/keywords/identification","display_name":"Identification","score":0.607131},{"id":"https://openalex.org/keywords/semiconductor-device-modeling","display_name":"Semiconductor device modeling","score":0.60348237},{"id":"https://openalex.org/keywords/wafer-testing","display_name":"Wafer testing","score":0.51056135}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8962649},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6580302},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.607131},{"id":"https://openalex.org/C4775677","wikidata":"https://www.wikidata.org/wiki/Q7449393","display_name":"Semiconductor device modeling","level":3,"score":0.60348237},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.51729727},{"id":"https://openalex.org/C44445679","wikidata":"https://www.wikidata.org/wiki/Q2538844","display_name":"Wafer testing","level":3,"score":0.51056135},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.47223708},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.43214765},{"id":"https://openalex.org/C152877465","wikidata":"https://www.wikidata.org/wiki/Q208042","display_name":"Regression analysis","level":2,"score":0.4191545},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.38985908},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.37592012},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.35189265},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.31213385},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.31104356},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2913944},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.12874085},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.122700155},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2015.2481719","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.55}],"grants":[{"funder":"https://openalex.org/F4320323843","funder_display_name":"Ministry of Information and Communication","award_id":null}],"datasets":[],"versions":[],"referenced_works_count":34,"referenced_works":["https://openalex.org/W1503196035","https://openalex.org/W1568244992","https://openalex.org/W1587454308","https://openalex.org/W1619532909","https://openalex.org/W1736726159","https://openalex.org/W1758941703","https://openalex.org/W1979336685","https://openalex.org/W2002964585","https://openalex.org/W2028695918","https://openalex.org/W2034243637","https://openalex.org/W2047122092","https://openalex.org/W2048106119","https://openalex.org/W2053798949","https://openalex.org/W2079519709","https://openalex.org/W2084625646","https://openalex.org/W2089785905","https://openalex.org/W2095834362","https://openalex.org/W2099454382","https://openalex.org/W2100351660","https://openalex.org/W2104441235","https://openalex.org/W2104550562","https://openalex.org/W2120196566","https://openalex.org/W2128489621","https://openalex.org/W2327660097","https://openalex.org/W2341214576","https://openalex.org/W24355941","https://openalex.org/W2554346648","https://openalex.org/W2621384249","https://openalex.org/W29277504","https://openalex.org/W4251391716","https://openalex.org/W4285719527","https://openalex.org/W4294576732","https://openalex.org/W46659105","https://openalex.org/W59411734"],"related_works":["https://openalex.org/W2992897358","https://openalex.org/W2631724279","https://openalex.org/W2593225652","https://openalex.org/W2540312267","https://openalex.org/W2367528910","https://openalex.org/W2156694894","https://openalex.org/W2112424816","https://openalex.org/W2075893297","https://openalex.org/W2070188681","https://openalex.org/W2031579205"],"abstract_inverted_index":{"Wafer":[0],"defects,":[1],"which":[2,151],"are":[3,10,152],"primarily":[4],"defective":[5],"chips":[6],"on":[7,134],"a":[8,73,95,110],"wafer,":[9],"of":[11,29,31,63,85,124,142,149,157],"the":[12,16,24,61,66,80,103,125,163],"key":[13],"challenges":[14],"facing":[15],"semiconductor":[17,89],"manufacturing":[18,67],"companies,":[19],"as":[20],"they":[21],"could":[22],"increase":[23],"yield":[25],"losses":[26],"to":[27,41,52,59,99],"hundreds":[28],"millions":[30],"dollars.":[32],"Fortunately,":[33],"these":[34],"wafer":[35,46,90,118,136],"defects":[36],"leave":[37],"unique":[38],"patterns":[39,87],"due":[40],"their":[42],"spatial":[43],"dependence":[44],"across":[45],"maps.":[47,91],"It":[48,92],"is":[49],"thus":[50],"possible":[51],"identify":[53],"and":[54,82,122,144],"predict":[55],"them":[56],"in":[57,65,88,162],"order":[58],"find":[60],"point":[62],"failure":[64],"process":[68],"accurately.":[69],"This":[70],"paper":[71],"introduces":[72],"novel":[74],"simplified":[75],"subspaced":[76],"regression":[77],"framework":[78],"for":[79],"accurate":[81],"efficient":[83],"identification":[84],"defect":[86,137],"can":[93],"achieve":[94],"test":[96],"error":[97],"comparable":[98],"or":[100],"better":[101,154],"than":[102,155],"state-of-the-art":[104],"machine-learning":[105],"(ML)-based":[106],"methods,":[107],"while":[108],"maintaining":[109],"low":[111],"computational":[112],"cost":[113],"when":[114],"dealing":[115],"with":[116],"large-scale":[117],"data.":[119],"The":[120],"effectiveness":[121],"utility":[123],"proposed":[126],"approach":[127],"has":[128],"been":[129],"demonstrated":[130],"by":[131],"our":[132],"experiments":[133],"real":[135],"datasets,":[138],"achieving":[139],"detection":[140],"accuracy":[141],"99.884%":[143],"R":[145],"2":[148],"99.905%,":[150],"far":[153],"those":[156],"any":[158],"existing":[159],"methods":[160],"reported":[161],"literature.":[164]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2186511346","counts_by_year":[{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":13},{"year":2022,"cited_by_count":9},{"year":2021,"cited_by_count":12},{"year":2020,"cited_by_count":14},{"year":2019,"cited_by_count":12},{"year":2018,"cited_by_count":6},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2024-12-12T03:33:47.252669","created_date":"2016-06-24"}
