{"id":"https://openalex.org/W2884968654","doi":"https://doi.org/10.1109/tase.2018.2848635","title":"Soft-Acting, Noncontact Gripping Method for Ultrathin Wafers Using Distributed Bernoulli Principle","display_name":"Soft-Acting, Noncontact Gripping Method for Ultrathin Wafers Using Distributed Bernoulli Principle","publication_year":2018,"publication_date":"2018-07-18","ids":{"openalex":"https://openalex.org/W2884968654","doi":"https://doi.org/10.1109/tase.2018.2848635","mag":"2884968654"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2018.2848635","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"journal-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100407529","display_name":"Dong Liu","orcid":"https://orcid.org/0000-0003-3988-7879"},"institutions":[{"id":"https://openalex.org/I27357992","display_name":"Dalian University of Technology","ror":"https://ror.org/023hj5876","country_code":"CN","type":"education","lineage":["https://openalex.org/I27357992"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dong Liu","raw_affiliation_strings":["School of Mechanical Engineering, Dalian University of Technology, Dalian, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Dalian University of Technology, Dalian, China","institution_ids":["https://openalex.org/I27357992"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046791611","display_name":"Chek Sing Teo","orcid":"https://orcid.org/0000-0003-1037-1465"},"institutions":[{"id":"https://openalex.org/I4210091207","display_name":"Singapore Institute of Manufacturing Technology","ror":"https://ror.org/00f44np30","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210091207","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Chek Sing Teo","raw_affiliation_strings":["Mechatronics Group, Singapore Institute of Manufacturing Technology, Singapore"],"affiliations":[{"raw_affiliation_string":"Mechatronics Group, Singapore Institute of Manufacturing Technology, Singapore","institution_ids":["https://openalex.org/I4210091207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080546069","display_name":"Wenyu Liang","orcid":"https://orcid.org/0000-0003-0278-2723"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Wenyu Liang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, National University of Singapore, Singapore"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5045554497","display_name":"Kok Kiong Tan","orcid":"https://orcid.org/0000-0002-4245-070X"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Kok Kiong Tan","raw_affiliation_strings":["Department of Electrical and Computer Engineering, National University of Singapore, Singapore"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]}],"institution_assertions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.472,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":15,"citation_normalized_percentile":{"value":0.748495,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":89},"biblio":{"volume":"16","issue":"2","first_page":"668","last_page":"677"},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T11737","display_name":"4D Printing Technologies","score":0.993,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11737","display_name":"4D Printing Technologies","score":0.993,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Analysis and Control of Axially Moving Dynamics","score":0.9869,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12141","display_name":"Dynamics and Stability of Thin Liquid Films","score":0.9843,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/grippers","display_name":"Grippers","score":0.5744461},{"id":"https://openalex.org/keywords/soft-robotics","display_name":"Soft Robotics","score":0.490089}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.80436003},{"id":"https://openalex.org/C152361515","wikidata":"https://www.wikidata.org/wiki/Q181328","display_name":"Bernoulli's principle","level":2,"score":0.74990726},{"id":"https://openalex.org/C2775960376","wikidata":"https://www.wikidata.org/wiki/Q1435859","display_name":"Grippers","level":2,"score":0.5744461},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.54750544},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5076355},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.45323232},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3409372},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3176497},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2779606},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.15466192},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2018.2848635","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[],"grants":[],"datasets":[],"versions":[],"referenced_works_count":16,"referenced_works":["https://openalex.org/W1899708428","https://openalex.org/W1980405136","https://openalex.org/W1981999954","https://openalex.org/W1983463109","https://openalex.org/W2023066650","https://openalex.org/W2024403443","https://openalex.org/W2033690335","https://openalex.org/W2067165135","https://openalex.org/W2067976631","https://openalex.org/W2103842326","https://openalex.org/W2212838879","https://openalex.org/W2335600244","https://openalex.org/W2342543544","https://openalex.org/W2467329162","https://openalex.org/W81082500","https://openalex.org/W84665116"],"related_works":["https://openalex.org/W4312985516","https://openalex.org/W4283263216","https://openalex.org/W3160851599","https://openalex.org/W3124536754","https://openalex.org/W2808090143","https://openalex.org/W2527333706","https://openalex.org/W2258669850","https://openalex.org/W2121467562","https://openalex.org/W2078285315","https://openalex.org/W1513401665"],"abstract_inverted_index":{"The":[0,125],"handling":[1],"of":[2,63,80,95,101,158],"ultrathin":[3,32,56],"wafers":[4,57],"(<;100":[5],"\u03bcm":[6],"thickness)":[7],"is":[8,58,136],"a":[9,25],"challenging":[10],"task":[11],"since":[12],"these":[13],"are":[14,66,88,112,123],"among":[15],"the":[16,36,49,61,64,78,81,93,96,109,116,119,132,151],"thinnest":[17],"and":[18,27,40,60,71,86,105,142,160,165],"most":[19],"fragile":[20,143,166],"materials.":[21,144,167],"This":[22,145],"paper":[23,146],"provides":[24,147],"soft-acting":[26,159],"noncontact":[28,161],"gripping":[29,134,140,162],"technology":[30,135],"for":[31,47,55,76,149,163],"wafer":[33],"based":[34],"on":[35,108,115],"distributed":[37,52,152],"Bernoulli":[38,53,153],"principle,":[39],"also":[41],"proposes":[42],"an":[43],"experimental":[44,117],"measurement":[45,91],"method":[46],"evaluating":[48,77],"performance.":[50],"A":[51],"gripper":[54,65],"designed,":[59],"characteristics":[62],"studied":[67],"via":[68],"theoretical":[69],"analysis":[70],"experiments.":[72],"Three":[73],"performance":[74,110],"indices":[75,111],"properties":[79],"soft":[82,139],"gripping:":[83],"deformation,":[84],"vibration,":[85],"stress":[87],"presented.":[89],"Through":[90],"experiments,":[92],"effects":[94],"key":[97],"operational":[98],"parameters":[99,121],"consisting":[100],"air":[102],"flow":[103],"rate":[104],"gap":[106],"height":[107],"investigated.":[113],"Based":[114],"data,":[118],"appropriate":[120],"settings":[122],"obtained.":[124],"comparison":[126],"to":[127],"present":[128],"grippers":[129],"reveals":[130],"that":[131],"proposed":[133],"superior":[137],"in":[138,155],"thin":[141,164],"guidance":[148],"implementing":[150],"principle":[154],"practical":[156],"applications":[157]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2884968654","counts_by_year":[{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1}],"updated_date":"2024-11-24T23:02:49.753557","created_date":"2018-08-03"}
