{"id":"https://openalex.org/W2099697258","doi":"https://doi.org/10.1109/cicc.2011.6055355","title":"28nm metal-gate high-K CMOS SoC technology for high-performance mobile applications","display_name":"28nm metal-gate high-K CMOS SoC technology for high-performance mobile applications","publication_year":2011,"publication_date":"2011-09-01","ids":{"openalex":"https://openalex.org/W2099697258","doi":"https://doi.org/10.1109/cicc.2011.6055355","mag":"2099697258"},"language":"en","primary_location":{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2011.6055355","pdf_url":null,"source":{"id":"https://openalex.org/S4363608585","display_name":"2022 IEEE Custom Integrated Circuits Conference (CICC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false},"type":"article","type_crossref":"proceedings-article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5104213703","display_name":"Shuhao Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.H. Yang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111881751","display_name":"J.Y. Sheu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.Y. Sheu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113520233","display_name":"M. Ieong","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.K. Ieong","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085545279","display_name":"Meng\u2010Hsueh Chiang","orcid":"https://orcid.org/0000-0003-4789-6302"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.H. Chiang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046026372","display_name":"Tsuyoshi Yamamoto","orcid":"https://orcid.org/0000-0002-2804-5994"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Yamamoto","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111294816","display_name":"J.J. Liaw","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.J. Liaw","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110192251","display_name":"Shun-Bao Chang","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.S. Chang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058503916","display_name":"Yu-Hsuan Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y.M. Lin","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113168335","display_name":"tsui ling hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T.L. Hsu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114029319","display_name":"Jiyong Hwang","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.R. Hwang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113114491","display_name":"J.K. Ting","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.K. Ting","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010556522","display_name":"Chih-Chiang Wu","orcid":"https://orcid.org/0000-0001-5072-1744"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.H. Wu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005250969","display_name":"K. C. Ting","orcid":"https://orcid.org/0009-0004-8620-4684"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.C. Ting","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103890122","display_name":"F. C. Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F.C. Yang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080069720","display_name":"C.M. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.M. Liu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112021219","display_name":"I-Jhih Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"I.L. Wu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077600147","display_name":"Y.M. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y.M. Chen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077771835","display_name":"S.J. Chent","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.J. Chent","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028469167","display_name":"K.S. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.S. Chen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111678229","display_name":"Jason Cheng","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.Y. Cheng","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081906025","display_name":"Ming-Hsien Tsai","orcid":"https://orcid.org/0000-0002-8546-6023"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.H Tsai","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001373715","display_name":"Wei\u2010Chin Chang","orcid":"https://orcid.org/0000-0002-1005-7815"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W. Chang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019580818","display_name":"R. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Chen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086418840","display_name":"C.C. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.C. Chen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033966582","display_name":"T.L. Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T.L. Lee","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038860671","display_name":"Cheng-Chung Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.K Lin","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011490291","display_name":"Shu Ching Yang","orcid":"https://orcid.org/0000-0003-4105-1747"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.C. Yang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113557252","display_name":"Y. M. Sheu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y.M. Sheu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018595858","display_name":"J.T. Tzeng","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.T. Tzeng","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103534343","display_name":"L.C. Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L.C. Lu","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110412758","display_name":"S. M. Jang","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.M Jang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033141421","display_name":"C.H. Diaz","orcid":"https://orcid.org/0000-0002-7235-3636"},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.H. Diaz","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037650524","display_name":"YJ Mii","orcid":null},"institutions":[{"id":"https://openalex.org/I1334877674","display_name":"Taiwan Semiconductor Manufacturing Company (United States)","ror":"https://ror.org/02rvfjx92","country_code":"US","type":"company","lineage":["https://openalex.org/I1334877674","https://openalex.org/I4210120917"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"YJ Mii","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C."],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin Rd.6, Science-Based Industrial Park, Hsin-Chu, Taiwan, R.O.C.","institution_ids":["https://openalex.org/I1334877674"]}]}],"institution_assertions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.449,"has_fulltext":true,"fulltext_origin":"ngrams","cited_by_count":13,"citation_normalized_percentile":{"value":0.935333,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":87,"max":88},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Atomic Layer Deposition Technology","score":0.9995,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Atomic Layer Deposition Technology","score":0.9995,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Nanoelectronics and Transistors","score":0.9994,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"Three-Dimensional Integrated Circuits","score":0.999,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metal-gate-transistors","display_name":"Metal Gate Transistors","score":0.553461},{"id":"https://openalex.org/keywords/cmos-scaling","display_name":"CMOS Scaling","score":0.542158},{"id":"https://openalex.org/keywords/high-performance-nanoscale-devices","display_name":"High-Performance Nanoscale Devices","score":0.541287},{"id":"https://openalex.org/keywords/double-gate-transistors","display_name":"Double-Gate Transistors","score":0.52311},{"id":"https://openalex.org/keywords/high-k-dielectrics","display_name":"High-k Dielectrics","score":0.514465},{"id":"https://openalex.org/keywords/metal-gate","display_name":"Metal gate","score":0.5122944},{"id":"https://openalex.org/keywords/gate-equivalent","display_name":"Gate equivalent","score":0.4311201}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.659153},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5877666},{"id":"https://openalex.org/C68043766","wikidata":"https://www.wikidata.org/wiki/Q267416","display_name":"Static random-access memory","level":2,"score":0.56741375},{"id":"https://openalex.org/C51140833","wikidata":"https://www.wikidata.org/wiki/Q6822740","display_name":"Metal gate","level":5,"score":0.5122944},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.50533015},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.469311},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4626779},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.4415686},{"id":"https://openalex.org/C60697091","wikidata":"https://www.wikidata.org/wiki/Q5527009","display_name":"Gate equivalent","level":5,"score":0.4311201},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36226296},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.34946185},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3161443},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.13612518},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2011.6055355","pdf_url":null,"source":{"id":"https://openalex.org/S4363608585","display_name":"2022 IEEE Custom Integrated Circuits Conference (CICC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.58,"display_name":"Industry, innovation and infrastructure"}],"grants":[],"datasets":[],"versions":[],"referenced_works_count":4,"referenced_works":["https://openalex.org/W2011447028","https://openalex.org/W2098958982","https://openalex.org/W2138558886","https://openalex.org/W2165765227"],"related_works":["https://openalex.org/W4240357461","https://openalex.org/W3027639110","https://openalex.org/W2804171474","https://openalex.org/W2788083601","https://openalex.org/W2461772443","https://openalex.org/W2170979950","https://openalex.org/W2111229858","https://openalex.org/W1974785766","https://openalex.org/W1900707063","https://openalex.org/W1527503723"],"abstract_inverted_index":{"An":[0],"industry":[1],"leading":[2],"28nm":[3],"high-performance":[4],"mobile":[5,37],"SoC":[6],"technology":[7,14],"featuring":[8],"metal-gate/high-k":[9],"process":[10,41,60],"is":[11,15,47,64],"presented.":[12],"The":[13],"optimized":[16],"to":[17],"offer":[18],"wide":[19],"power-to-performance":[20],"transistor":[21],"dynamic":[22],"range":[23],"and":[24,42,52,61],"highest":[25],"wired":[26],"gate":[27,50],"density":[28,51],"with":[29],"superior":[30],"low-R/ELK":[31],"interconnects,":[32],"critical":[33],"for":[34,49],"next":[35],"generation":[36],"computing/SOC":[38],"applications.":[39],"Through":[40],"design":[43,62],"optimization,":[44],"historical":[45],"trend":[46],"maintained":[48],"SRAM":[53],"cell":[54],"sizes.":[55],"Variations":[56],"control":[57],"strategy":[58],"through":[59],"collaboration":[63],"also":[65],"described.":[66]},"cited_by_api_url":"https://api.openalex.org/works?filter=cites:W2099697258","counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2024-11-20T06:52:34.797517","created_date":"2016-06-24"}