{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,7,27]],"date-time":"2024-07-27T09:07:17Z","timestamp":1722071237616},"reference-count":33,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2017,10,31]],"date-time":"2017-10-31T00:00:00Z","timestamp":1509408000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"Conventional gyroscopes are equipped with a single-axis control input, limiting their performance. Although researchers have proposed control algorithms with dual-axis control inputs to improve gyroscope performance, most have verified the control algorithms through numerical simulations because they lacked practical devices with dual-axis control inputs. The aim of this study was to design a piezoelectric gyroscope equipped with a dual-axis control input so that researchers may experimentally verify those control algorithms in future. Designing a piezoelectric gyroscope with a dual-axis control input is more difficult than designing a conventional gyroscope because the control input must be effective over a broad frequency range to compensate for imperfections, and the multiple mode shapes in flexural deformations complicate the relation between flexural deformation and the proof mass position. This study solved these problems by using a lead zirconate titanate (PZT) material, introducing additional electrodes for shielding, developing an optimal electrode pattern, and performing calibrations of undesired couplings. The results indicated that the fabricated device could be operated at 5.5\u00b11 kHz to perform dual-axis actuations and position measurements. The calibration of the fabricated device was completed by system identifications of a new dynamic model including gyroscopic motions, electromechanical coupling, mechanical coupling, electrostatic coupling, and capacitive output impedance. Finally, without the assistance of control algorithms, the \u201copen loop sensitivity\u201d of the fabricated gyroscope was 1.82 \u03bcV\/deg\/s with a nonlinearity of 9.5% full-scale output. This sensitivity is comparable with those of other PZT gyroscopes with single-axis control inputs.<\/jats:p>","DOI":"10.3390\/s17112505","type":"journal-article","created":{"date-parts":[[2017,10,31]],"date-time":"2017-10-31T16:48:31Z","timestamp":1509468511000},"page":"2505","source":"Crossref","is-referenced-by-count":4,"title":["Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope"],"prefix":"10.3390","volume":"17","author":[{"given":"Cheng-Yang","family":"Chang","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan"}]},{"ORCID":"http:\/\/orcid.org\/0000-0001-5893-5659","authenticated-orcid":false,"given":"Tsung-Lin","family":"Chen","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2017,10,31]]},"reference":[{"key":"ref_1","unstructured":"Nasiri, S. (2001). A Critical Review of MEMS Gyroscopes Technology and Commercialization Status, InvenSense."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"74","DOI":"10.1117\/12.436629","article-title":"Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities","volume":"4334","author":"Shkel","year":"2001","journal-title":"Proc. SPIE"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Chang, C.Y., and Chen, T.L. (2016, January 18\u201320). Design and Simulation of a New Dual-Axis Control Input Piezoelectric Gyroscope. Proceedings of the 2016 7th International Conference on Mechanical and Aerospace Engineering, London, UK.","DOI":"10.1109\/ICMAE.2016.7549549"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0957-0233\/20\/9\/092001","article-title":"Piezoelectric MEMS sensors state-of-the-art and perspectives","volume":"20","author":"Tadigadapa","year":"2009","journal-title":"Meas. Sci. Technol."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"415","DOI":"10.1119\/1.2711826","article-title":"Introduction to the quartz tuning fork","volume":"75","author":"Friedt","year":"2007","journal-title":"Am. J. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Antonello, R., and Oboe, R. (2009, January 3\u20135). Open Loop Compensation of the Quadrature Error in MEMS Vibrating Gyroscopes. Proceedings of the 35th Annual Conference of IEEE Industrial Electronics, Porto, Portugal.","DOI":"10.1109\/IECON.2009.5415319"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"2868","DOI":"10.1143\/JJAP.37.2868","article-title":"Electromechancial Coupling Coefficients for a New H-Type LiTaO3 Piezoelectric Gyroscope","volume":"3","author":"Tanaka","year":"1998","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"5576","DOI":"10.1143\/JJAP.40.5756","article-title":"Finite Element Method Simulation of a New One-Chip-Style Quartz Crystal Motion Sensor with Two Function of Gyro and Acceleration Detection","volume":"40","author":"Koitabashi","year":"2001","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_9","unstructured":"Tatar, E. (2010). Quadrature Error Compensation and Its Effects on the Performance of Full Decoupled MEMS Gyroscopes. [Master\u2019s Thesis, Middle East Technical University]."},{"key":"ref_10","unstructured":"Mayberry, C. (2014). Interface Circuit for Readout and Control of a Micro-Hemispherical Resonating Gyroscope. [Master\u2019s Thesis, Georgia Institute of Technology]."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Song, M.L., Zhou, B., and Zhang, Y.J. (2016, January 12\u201314). Control Scheme and Error Suppression Method for Micro Rate Integrating Gyroscopes. Proceedings of the 2016 IEEE Chinese Guidance, Navigation and Control Conference, Nanjing, China.","DOI":"10.1109\/CGNCC.2016.7829163"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Liu, J., and Shen, C. (2016). Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods. Sensors, 16.","DOI":"10.3390\/s16010071"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Fei, J., Yan, W., and Yang, Y. (2014). Adaptive nonsingular Terminal Sliding Mode Control of MEMS Gyroscope Based on Backstepping Design. Int. J. Adapt. Control Signal Process., 1099\u20131115.","DOI":"10.1002\/acs.2523"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"12482","DOI":"10.3390\/s130912482","article-title":"A Multi-Fork Z-Axis Quartz Micromachined Gyroscope","volume":"13","author":"Feng","year":"2013","journal-title":"Sensors"},{"key":"ref_15","unstructured":"Park, S. (2000). Adaptive Control Strategies for MEMS Gyroscopes. [Ph.D. Thesis, University of California]."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"101","DOI":"10.1109\/JMEMS.2002.807468","article-title":"Adaptive Control for the Conventional Mode of Operation of MEMS Gyroscopes","volume":"12","author":"Park","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"55201","DOI":"10.1088\/0957-0233\/22\/5\/055201","article-title":"Single-Stage Vibratory Gyroscope Control Methods for Direct Angle Measurements","volume":"22","author":"Chi","year":"2011","journal-title":"Meas. Sci. Technol."},{"key":"ref_18","unstructured":"Chi, C.Y. (2010). MEMS Gyroscope Systems with Imperfection Compensations and Direct Angle Measurements. [Ph.D. Thesis, National Chiao Tung University]."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"2201","DOI":"10.1007\/s00542-015-2538-z","article-title":"Analysis of Parasitic Feedthrough Capacitance Effect in Closed Loop Drive Circuit Design for Capacitive Micro Gyroscope","volume":"22","author":"Wu","year":"2015","journal-title":"Microsyst. Technol."},{"key":"ref_20","unstructured":"Kohnke, P. (1994). ANSYS Theory Reference, ANSYS."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Apostolyuk, V. (2016). Coriolis Vibratory Gyroscopes, Springer.","DOI":"10.1007\/978-3-319-22198-4"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Doll, J.C., and Pruitt, B.L. (2013). Piezoresistor Design and Applications, Springer.","DOI":"10.1007\/978-1-4614-8517-9"},{"key":"ref_23","first-page":"8","article-title":"Shielding and Guarding","volume":"17","author":"Rich","year":"1983","journal-title":"Analog Devices"},{"key":"ref_24","unstructured":"Ott, H.W. (1988). Noise Reduction Techniques in Electronic System, Wiley."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"4755","DOI":"10.3390\/s140304755","article-title":"Piezoelectric Energy Harvesting Solutions","volume":"14","author":"Rongala","year":"2014","journal-title":"Sensors"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Xin, D., and Hu, Y. (2016). A Digitalized Gyroscope System Based on a Modified Adaptive Control Method. Sensors, 16.","DOI":"10.3390\/s16030321"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"20419","DOI":"10.3390\/s141120419","article-title":"Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes","volume":"14","author":"Ni","year":"2014","journal-title":"Sensors"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"14526","DOI":"10.3390\/s140814526","article-title":"High Temperature, High Power Piezoelectric Composite Transducers","volume":"14","author":"Lee","year":"2014","journal-title":"Sensors"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Acar, C., and Shkel, A. (2009). MEMS Vibratory Gyroscopes Sturctural Approaches to Improve Robustness, Springer.","DOI":"10.1007\/978-0-387-09536-3"},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Hof, L.A., and Ziki, J.A. (2017). Micro-Hole Drilling on Glass Substrates\u2014A Review. Micromachines, 8.","DOI":"10.3390\/mi8020053"},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Parent, A., Traon, O.L., Masson, S., and Foulgoc, B.L. (2007). A Coriolis Vibrating Gyro Made of Strong Piezoelectric Material. IEEE Sens., 876\u2013879.","DOI":"10.1109\/ICSENS.2007.4388541"},{"key":"ref_32","unstructured":"Franklin, G.F., and Powell, J.D. (2010). Feedback Control of Dynamic System, Pearson. [6th ed.]."},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Goericke, F.T., and Vigevani, G. (2012, January 7\u201310). Novel Thin-Film Piezoelectric Aluminum Nitride Rate Gyroscope. Proceedings of the 2012 IEEE International Ultrasonics Symposium, Dresden, Germany.","DOI":"10.1109\/ULTSYM.2012.0267"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/11\/2505\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,6,8]],"date-time":"2024-06-08T22:59:45Z","timestamp":1717887585000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/17\/11\/2505"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,10,31]]},"references-count":33,"journal-issue":{"issue":"11","published-online":{"date-parts":[[2017,11]]}},"alternative-id":["s17112505"],"URL":"https:\/\/doi.org\/10.3390\/s17112505","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,10,31]]}}}
